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1

Dimensionelle Metrologie an ebenen Substraten mit Mikro- und NanostrukturenDimensional Metrology on Plane Substrates with Micro- and Nanostructures

Bosse, Harald, Flügge, Jens, Köning, Rainer, Frase, Carl Georg, Häßler-Grohne, Wolfgang, Just, Andreas, Geckeler, Ralf

Journal:

tm - Technisches Messen

Année:

2009

Fichier:

PDF, 1.00 MB

2009

2

Optimal alignment of mirror-based pentaprisms for scanning deflectometric devices

Geckeler, Ralf D.

Journal:

Optical Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 461 KB

english, 2011

3

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Novel scheme for the ultraprecise and fast measurement of the nanotopography of large wafers

Weingaertner, Ingolf, Wurm, Matthias, Geckeler, Ralf D., Elster, Clemens, Schulz, Michael, Dumitrescu, Eugen, Krey, Stefan, Heinisch, Josef, Duparr, Angela, Singh, Bhanwar

Année:

2002

Langue:

english

Fichier:

PDF, 310 KB

english, 2002

4

Autocollimators for deflectometry: Current status and future progress

Ralf D. Geckeler, Andreas Just, Michael Krause, Valeriy V. Yashchuk

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2010

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2010

5

Sub-microradian surface slope metrology with the ALS Developmental Long Trace Profiler

Valeriy V. Yashchuk, Samuel Barber, Edward E. Domning, Jonathan L. Kirschman, Gregory Y. Morrison, Brian V. Smith, Frank Siewert, Thomas Zeschke, Ralf Geckeler, Andreas Just

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2010

Langue:

english

Fichier:

PDF, 1.23 MB

english, 2010

6

Terahertz profilometry at 600 GHz with 0.5 μm depth resolution

Hils, Bernhard, Thomson, Mark D., Löffler, Torsten, von Spiegel, Wolff, am Weg, Christian, Roskos, Hartmut G., de Maagt, Peter, Doyle, Dominic, Geckeler, Ralf D.

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 486 KB

english, 2008

7

A novel approach for extending autocollimator calibration from plane to spatial angles

Geckeler, Ralf D., Kranz, Oliver, Just, Andreas, Krause, Michael

Journal:

Advanced Optical Technologies

Année:

2012

Langue:

english

Fichier:

PDF, 1.55 MB

english, 2012

8

Calibration of angle encoders using transfer functions

Geckeler, Ralf D, Fricke, Andreas, Elster, Clemens

Journal:

Measurement Science and Technology

Année:

2006

Langue:

english

Fichier:

PDF, 198 KB

english, 2006

9

A shearing-based method for the simultaneous calibration of angle measuring devices

Geckeler, Ralf D, Just, Andreas

Journal:

Measurement Science and Technology

Année:

2014

Langue:

english

Fichier:

PDF, 1.70 MB

english, 2014

10

Achieving Nanorad Level Stability of Beam Deflection with Scanning Pentaprisms

Geckeler, Ralf D.

Journal:

Key Engineering Materials

Année:

2008

Langue:

english

Fichier:

PDF, 1.69 MB

english, 2008

11

SPIE Proceedings [SPIE Optics & Photonics - San Diego, CA (Sunday 13 August 2006)] Interferometry XIII: Applications - Error minimization in high-accuracy scanning deflectometry

Geckeler, Ralf D., Novak, Erik L., Osten, Wolfgang, Gorecki, Christophe

Année:

2006

Langue:

english

Fichier:

PDF, 1.13 MB

english, 2006

12

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components - Sub-nm topography measurement by deflectometry: flatness standard and wafer nanotopography

Geckeler, Ralf D., Weingaertner, Ingolf, Duparr, Angela, Singh, Bhanwar

Année:

2002

Langue:

english

Fichier:

PDF, 860 KB

english, 2002

13

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 10 August 2008)] Advances in X-Ray/EUV Optics and Components III - Distance-dependent influences on angle metrology with autocollimators in deflectometry

Geckeler, Ralf D., Just, Andreas, Goto, Shunji, Khounsary, Ali M., Morawe, Christian

Année:

2008

Langue:

english

Fichier:

PDF, 1.56 MB

english, 2008

14

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - Optimized use and calibration of autocollimators in deflectometry

Geckeler, Ralf D., Just, Andreas, Assoufid, Lahsen, Takacs, Peter Z., Ohtsuka, Masaru

Année:

2007

Langue:

english

Fichier:

PDF, 4.01 MB

english, 2007

15

Capabilities and limitations of the self-calibration of angle encoders

Geckeler, Ralf D, Link, Alfred, Krause, Michael, Elster, Clemens

Journal:

Measurement Science and Technology

Année:

2014

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2014

16

ESAD Shearing Deflectometry: A Primary Flatness Standard with Sub-Nanometer Uncertainty

Geckeler, Ralf D.

Journal:

Key Engineering Materials

Année:

2008

Langue:

english

Fichier:

PDF, 2.48 MB

english, 2008

17

Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine

Qian, Shinan, Geckeler, Ralf D., Just, Andreas, Idir, Mourad, Wu, Xuehui

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2015

Langue:

english

Fichier:

PDF, 818 KB

english, 2015

18

Optimal use of pentaprisms in highly accurate deflectometric scanning

Geckeler, Ralf D

Journal:

Measurement Science and Technology

Année:

2007

Langue:

english

Fichier:

PDF, 388 KB

english, 2007

19

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Advances in Metrology for X-Ray and EUV Optics V - Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

Assoufid, Lahsen, Ohashi, Haruhiko, Asundi, Anand K., Yandayan, Tanfer, Geckeler, Ralf D., Siewert, Frank

Année:

2014

Langue:

english

Fichier:

PDF, 895 KB

english, 2014

20

From plane to spatial angles: PTB’s spatial angle autocollimator calibrator

Kranz, Oliver, Geckeler, Ralf D., Just, Andreas, Krause, Michael, Osten, Wolfgang

Journal:

Advanced Optical Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 3.09 MB

english, 2015

21

SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - ESAD shearing deflectometry: potentials for synchrotron beamline metrology

Geckeler, Ralf D., Khounsary, Ali M., Morawe, Christian

Année:

2006

Langue:

english

Fichier:

PDF, 1.69 MB

english, 2006

22

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - High-accuracy form measurement of large optical surfaces

Schulz, Michael, Geckeler, Ralf D., Illemann, Jens, Decker, Jennifer E., Brown, Nicholas

Année:

2003

Langue:

english

Fichier:

PDF, 336 KB

english, 2003

23

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - Proposal for a universal test mirror for characterization of slope measuring instruments

Yashchuk, Valeriy V., Assoufid, Lahsen, Takacs, Peter Z., McKinney, Wayne R., Warwick, Tony, Ohtsuka, Masaru, Noll, Tino, Siewert, Frank, Zeschke, Thomas, Geckeler, Ralf D.

Année:

2007

Langue:

english

Fichier:

PDF, 1.13 MB

english, 2007

24

SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Recent Developments in Traceable Dimensional Measurements - Tracing back radius of curvature and topography to the base unit of length with ultraprecision

Weingaertner, Ingolf, Schulz, Michael, Geckeler, Ralf D., Jusko, Otto, Neugebauer, Michael, Nicolaus, Arnold, Boensch, Gerhard, Decker, Jennifer E., Brown, Nicholas

Année:

2001

Langue:

english

Fichier:

PDF, 505 KB

english, 2001

25

SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Modeling Aspects in Optical Metrology IV - Modelling PTB's spatial angle autocollimator calibrator

Kranz, Oliver, Geckeler, Ralf D., Just, Andreas, Krause, Michael, Bodermann, Bernd, Frenner, Karsten, Silver, Richard M.

Année:

2013

Langue:

english

Fichier:

PDF, 437 KB

english, 2013

26

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Advances in Metrology for X-Ray and EUV Optics III - Developmental long trace profiler using optimally aligned mirror based pentaprism

Barber, Samuel K., Assoufid, Lahsen, Takacs, Peter Z., Morrison, Gregory Y., Yashchuk, Valeriy V., Asundi, Anand K., Gubarev, Mikhail V., Geckeler, Ralf D., Buchheim, Jana, Siewert, Frank, Zeschke, Th

Année:

2010

Langue:

english

Fichier:

PDF, 2.62 MB

english, 2010

27

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Advances in Metrology for X-Ray and EUV Optics - Scanning form measurement for curved surfaces

Schulz, Michael, Assoufid, Lahsen, Takacs, Peter Z., Geckeler, Ralf D., Taylor, John S.

Année:

2005

Langue:

english

Fichier:

PDF, 1012 KB

english, 2005

28

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - High-accuracy profile form measurement by a scanning system consisting of an angle sensor and coupled distance sensors

Gerhardt, Joachim, Osten, Wolfgang, Gorecki, Christophe, Geckeler, Ralf, Schulz, Michael, Novak, Erik L., Elster, Clemens

Année:

2005

Langue:

english

Fichier:

PDF, 594 KB

english, 2005

29

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - Stability analysis for the TMS method: Influence of high spatial frequencies

Wiegmann, Axel, Osten, Wolfgang, Gorecki, Christophe, Elster, Clemens, Geckeler, Ralf D., Novak, Erik L., Schulz, Michael

Année:

2007

Langue:

english

Fichier:

PDF, 1006 KB

english, 2007

30

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] Optical Metrology in Production Engineering - A new method and a novel facility for ultra precise 2D topography measurement of large optical surfaces

Wurm, Matthias, Osten, Wolfgang, Takeda, Mitsuo, Geckeler, Ralf D.

Année:

2004

Langue:

english

Fichier:

PDF, 664 KB

english, 2004

31

SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Recent Developments in Traceable Dimensional Measurements - Use and treaceable calibration of autocollimators for ultra-precise measurement of slope and topography

Geckeler, Ralf D., Weingaertner, Ingolf, Just, Andreas, Probst, Reinhard, Decker, Jennifer E., Brown, Nicholas

Année:

2001

Langue:

english

Fichier:

PDF, 361 KB

english, 2001

32

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] X-Ray Mirrors, Crystals, and Multilayers II - Topography measurement of nanometer synchrotron optics

Illemann, Jens, Geckeler, Ralf D., Weingartner, Ingolf, Schlewitt, Carsten, Grubert, Bernd, Schnabel, Olaf, Freund, Andreas K., Macrander, Albert T., Ishikawa, Tetsuya, Wood, James L.

Année:

2002

Langue:

english

Fichier:

PDF, 593 KB

english, 2002

33

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II - Traceable multiple sensor system for absolute form measurement

Schulz, Michael, Duparr½Á, Angela, Singh, Bhanwar, Gerhardt, Joachim, Geckeler, Ralf D., Gu, Zu-Han, Elster, Clemens

Année:

2005

Langue:

english

Fichier:

PDF, 201 KB

english, 2005

34

High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments

Yashchuk, Valeriy V., Artemiev, Nikolay A., Centers, Gary, Chaubard, Arthur, Geckeler, Ralf D., Lacey, Ian, Marth, Harry, McKinney, Wayne R., Noll, Tino, Siewert, Frank, Winter, Mathias, Zeschke, Thom

Journal:

Review of Scientific Instruments

Année:

2016

Langue:

english

Fichier:

PDF, 4.21 MB

english, 2016

35

Investigations of interpolation errors of angle encoders for high precision angle metrology

Yandayan, Tanfer, Geckeler, Ralf D, Just, Andreas, Krause, Michael, Akgöz, Aslı, Aksulu, Murat, Grubert, Bernd, Watanabe, Tsukasa

Journal:

Measurement Science and Technology

Année:

2018

Langue:

english

Fichier:

PDF, 1.93 MB

english, 2018

36

Influence of the air’s refractive index on precision angle metrology with autocollimators

Geckeler, Ralf D, Křen, Petr, Just, Andreas, Schumann, Matthias, Krause, Michael

Journal:

Measurement Science and Technology

Année:

2018

Langue:

english

Fichier:

PDF, 2.04 MB

english, 2018

37

The spatial angle autocollimator calibrator: optimised model, uncertainty budget and experimental validation

Schumann, Matthias, Geckeler, Ralf D, Krause, Michael, Just, Andreas

Journal:

Année:

2019

Langue:

english

Fichier:

PDF, 2.03 MB

english, 2019

38

A Search of Variable Stars in the Tycho Observations

Piquard, Sandrine, Halbwachs, Jean-Louis, Fabricius, Claus, Geckeler, Ralf, Wicenec, Andreas

Journal:

International Astronomical Union Colloquium

Année:

2000

Fichier:

PDF, 118 KB

2000

39

CCD photometry of variable subdwarfs and white dwarfs at Calar Alto Observatory

Schuh, Sonja, Dreizier, Stefan, Deetjen, Jochen L., Heber, Uli, Geckeler, Ralf D.

Journal:

Année:

2000

Fichier:

PDF, 744 KB

2000